Electroanalysis at the Nanoscale

This article reviews the state of the art of silicon chip–based nanoelectrochemical devices for sensing applications. We first describe analyte mass transport to nanoscale electrodes and emphasize understanding the importance of mass transport for the design of nanoelectrode arrays. We then describe bottom-up and top-down approaches to nanoelectrode fabrication and integration at silicon substrates. Finally, we explore recent examples of on-chip nanoelectrodes employed as sensors and diagnostics, finishing with a brief look at future applications.