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Abstract

Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.

Keyword(s): actuatorsferroelectricMEMSsensors
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/content/journals/10.1146/annurev.matsci.28.1.563
1998-08-01
2024-06-12
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  • Article Type: Review Article
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