1932

Annual Review of Materials Research

Volume 13, 1983

Review Article

Material Processing with Broad-Beam Ion Sources

J M E Harper, and J J Cuomo
Vol. 13:413-439 (Volume publication date August 1983) https://doi.org/10.1146/annurev.ms.13.080183.002213
© Annual Reviews

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1983-08-01

2024-10-12

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Article Type: Review Article

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