1932

Annual Review of Materials Research

Volume 16,

Review Article

Plasma-Surface Interactions in Plasma-Enhanced Chemical Vapor Deposition

Dennis W. Hess
Vol. 16:163-183 (Volume publication date August 1986) https://doi.org/10.1146/annurev.ms.16.080186.001115
© Annual Reviews

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1986-08-01

2025-04-27

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Article Type: Review Article

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