1932

Annual Review of Physical Chemistry

Volume 38,

Review Article

Mechanistic Studies of Chemical Vapor Deposition

J M Jasinski, B S Meyerson, and B A Scott
Vol. 38:109-140 (Volume publication date October 1987) https://doi.org/10.1146/annurev.pc.38.100187.000545
© Annual Reviews

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1987-10-01

2024-10-12

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Article Type: Review Article

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