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Recent experimental advances have uncovered many of the diverse reaction pathways following an energetic collision between a molecular ion and a solid surface. Hyperthermal translational energies (5–500 eV) are sufficient to activate a number of chemical transformations in the near-surface region, including charge transfer, dissociation, abstraction, and deposition. State-of-the-art scattering studies probe the consumption and disposal of energy and the effects of approach geometry and surface electronic structure on the operative reaction mechanisms. These fundamental investigations provide insight relevant to the fabrication of microelectronics devices, the interaction of space vehicles with the earth's atmosphere, and the development of analytical techniques in mass spectrometry.
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